
Introduction to Microelectromechanical Devices and Systems
Lecturers: Evangelos Hristoforou
Lecture Hours - Lab Hours: 0 - 0
Description
Basic principles of sensors: sensitivity, uncertainty, hysteresis, linearity, parameters affecting the sensor response, sensor characterization techniques, Laboratories of Testing and Calibration
Physical and chemical effects, used for the sensor operation: effects in conducting, semiconducting, dielectric, magnetic and superconducting materials
Sensors: mechanical sensors (displacement, position, speed, acceleration, flow, force, tensile & compressive stresses, pressure), electric-magnetic sensors (current, electric field, magnetic field, magnetic anomaly detectors), thermodynamic sensors (temperature, relative humidity, moisture), chemical sensors (ISFET)
Sensor applications: energy & environment, health, defence, industrial applications, system automation, domestic applications, etc.
Lab exercises: Hall sensor calibration, magnetic sensors for position and field detection, Arduino & applications