Microelectronics: Fabrication of Integrated Circuits

Code 3.5.3203.7
Semester 7th
Flow H - Electronics, Circuits, Materials
Category Obligatory by selection
Credits 4
Class Hours - Lab Hours 2 - 1
Lecturers Evangelos Hristoforou
Links Helios, Course's Website
Web Platform Class 1: Microsoft Teams


It introduces the Electronic and Computer engineer to the world of silicon technology starting from the fabrication of single crystal Si wafers and ending with the fabrication steps of both BJTs and MOSFETs. Quantitative analysis of the fabrication techniques used (i.e. Si oxidation, thermal diffusion of impurities, ion implantation, thin film deposition using CVD and PVD, lithography and etching ) is given together with an introduction to the SUPREM which is used by the students to simulate the fabrication process of an integrated component like BJT, MOSFET, resistors, capacitors.