Microsystems and Nanotechnology

Code 9.4.3378.9
Semester 9th
Flow H - Electronics, Circuits, Materials
Category Obligatory by selection
Credits 4
Class Hours - Lab Hours 2 - 2
Lecturers Dimitrios Tsoukalas (School of AMPS)


Microsystems and nanosystems: Definitions and examples. Relationship between microelectronic, micro-optical and micro-electro-mechanical technology.
Basic microelectronic technology processes and modeling: Thermal oxidation, dopant diffusion, ion implantation, physical and chemical deposition, e-beam and optical lithography, plasma etching. Advanced processes for nanoelectronics.
Special processes for micromechanics and microsensor fabrication. Surface, bulk micromachining. Physical principles of sensors operation. Examples on fabrication and operation of physical and biochemical microsensors. Lab-on-Chip and biosensors.
From microtechnology to nanotechnology: Methods of fabrication at the nanoscale. Top-down and bottom-up approaches. Fabrication of nanoparticles and nanowires, their interaction with the macro-world and application to sensing. Nanometrology.