Introduction to Microelectromechanical Devices and Systems
| Code | 590 |
|---|---|
| Semester | Spring |
| Class Hours - Lab Hours | 2 - 0 |
| Lecturers | Evangelos Hristoforou |
Description
This course presents an introduction to the principles, fabrication techniques, and applications of micro electromechanical systems (MEMS). Students will gain an in-depth understanding of sensors and actuator principles and integrated microfabrication techniques for MEMS. It also consists of a comprehensive investigation of state-of-the-art MEMS devices and systems.
A student in this class will be able to understand the following: a) the definition of micromachining and MEMS as well as an historical perspective of this emerging fieldb) the fundamental principle of electrostatic actuation and methods for fabricating c) the fundamental principle of piezo-resistive sensing and methods for fabricating.Finally, the students willlearn to gather information from scientific journals, to analyze the strengths/weaknesses of a MEMS sensor/actuator approach, and to present in a written report recent advances on sensors and actuators of their choice.